|
McMillan Company- specializes in the design and manufacturing of precise gas and liquid flow sensors, meters, and controllers.
|
Products for Ultra High Purity Liquid Applications
|
MODEL U701
UHP liquid flow sensor with pulse output and U-shaped flow path.
McMillan Model U701 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in
microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U701 features a U-shaped space-saving flow path and pulse output. Download brochure.
|
|
MODEL U702
UHP liquid flow sensor with analog output and U-shaped flow path.
McMillan Model U702 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in
microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U702 features a U-shaped space-saving flow path and an analog output. Download brochure.
|
|
MODEL U705
UHP liquid flow sensor with pulse output and straight flow path
McMillan Model U705 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in
microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U705 features a straight flow path and a pulse output. Download brochure.
|
|
MODEL U706
HP liquid flow sensor with analog output and straight flow path.
McMillan Model U706 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in
microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U706 features a straight flow path and an analog output. Download brochure.
|
|
MODEL U707
Compact UHP liquid flow sensor with pulse output.
McMillan Model U707 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in
microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U707 features a compact footprint-reducing design and a pulse output. Download brochure.
|
|
MODEL U708
Compact UHP liquid flow sensor with analog output.
McMillan Model U708 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in
microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist. These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of
consistent results.The Model U708 features a compact footprint-reducing design and an analog output. Download brochure.
|
|
MODEL U709
Liquid flow monitor for photoresist dispense verification.
McMillan Model U709 UHP Liquid FLO-MONITORS will precisely measure flow rates of virtually any photoresist chemical, whether a short burst of flow or a continuous flow. Dispenses as short as 500 milliseconds and volumes as low as 0.1 grams can be detected repeatably. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no
particle generation or elemental contamination. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist. These FLO-MONITORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment,
and a certificate of calibration accompanies all FLO-MONITORS. The reliable technology used reassures process engineers of consistent repeatable results. Download brochure.
|
|
MODEL U801
UHP liquid flow controller with external display module.
The Model U801 Ultra-High-Purity (UHP) FLO-CONTROLLER will precisely measure and control flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 LPM. Repeatable results are achieved by utilizing a patented microturbine flow sensor design. The system includes both a valve module where fluid connections are made and a control module where electrical connections are made. The Model U801 UHP FLO-CONTROLLER integrates a proportional
double-diaphragm valve to accurately control flow rate. McMillan design insures long life expectancy under normal operating conditions - millions of cycles with no valve degradation.1.0% full-scale accuracy (including linearity & hysteresis) provides the critical control required for modern microelectronic applications. Unparalleled repeatability reassures process engineers that results will be consistent. An optional temperature rating of
0-90°C allows use in most UHP applications. Download brochure. Download application note: Particle Counter Flow Control.
Download Application Note: Point of Use Dilution
|
|
MODEL U802
UHP liquid flow controller.
The Model U802 Ultra-High-Purity (UHP) FLO-CONTROLLER will precisely measure and control flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 LPM. Repeatable results are achieved by utilizing a patented microturbine flow sensor design. This controller integrates all electronics and fluid components into a single package, eliminating the need for any external modules. The Model U802 UHP FLO-CONTROLLER integrates a proportional
double-diaphragm valve to accurately control flow rate. McMillan design insures long life expectancy under normal operating conditions - millions of cycles with no valve degradation. 1.0% full-scale accuracy (including linearity & hysteresis) provides the critical control required for modern microelectronic applications. Unparalleled repeatability reassures process engineers that results will be consistent.An optional temperature rating of
0-90°C allows use in most UHP applications. Download brochure.
|
|
MODEL U803
Compact UHP liquid flow controller with U-shaped flow path.
McMillan Model U803 UHP FLO-CONTROLLERS will precisely measure and control flow rates of virtually any fluid as low as 7 mLpm or as high as 1 Lpm. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. An integrated proportional control valve is utilized to regulate flow rate. PTFE, perfluoroelastomers,
and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-CONTROLLERS. A repeatability capability of ±0.2% full scale reassures process engineers of consistent results. Download brochure.
|
|
MODEL U804
Compact UHP liquid flow controller with straight-through flow path.
McMillan Model U804 UHP FLO-CONTROLLERS will precisely measure and control flow rates of virtually any fluid as low as 7 mLpm or as high as 1 Lpm. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. An integrated proportional control valve is utilized to regulate flow rate. PTFE, perfluoroelastomers,
and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-CONTROLLERS. A repeatability capability of ±0.2% full scale reassures process engineers of consistent results. Download brochure.
|
|
|
