ETA Process Instrumentation - since 1971

ETA Process Instrumentation -- Since 1971

ETA Associates merged with Process Instrumentation Inc. as of 9/1/2011. Visit our sister companies: Safety Inc and iFacility Service.

     Home

  Manufacturers 

Industries & Instruments

Technical Resources

    Service   

     About      

Horiba Environmental
and Process Instruments 		 

GA-360E Trace Gas Monitor

Download printable brochure.

 Horiba GA-360E Series

Overview

The GA-360E/F360E Series is a line up of units that provide ultrahigh sensitive, highly accurate, continuous monitoring of trace amounts of impurities contained in gases (N2, O2, He, Ar, H2, and Air) used in the semiconductor manufacturing process. Utilizing a cross-modulation method, GA-360E/F360 Series units have no zero drift due to the simultaneous analysis of the zero gas and ordinary time comparison and offer long-term, stable measurement values. A 19-inch rack makes for easy systems upgrade. GA-360E/F360 Series analyzers are well suited for use at semiconductor gas production facilities.

 

Features

  • The units are equipped with a maximum two-component function within the one-component analysis capability for CO, CO2, and CH4 and are capable of simultaneous digital display of the concentrations of two components.

  • The units use a cross-modulation method and have no zero drift, thereby providing long-term, stable, continuous display values.
  • Elimination of the need for optics adjustment makes for easy maintenance.
  • A self-monitoring function for the flow volume (pressure), chopper motor (electromagnetic valve), accidental fire warning (GA-360E), and electrical source warning systems provides users with quick alerts to any irregularities.

Manufactured by HORIBA

 

Specifications

 Model name          

GA-360E

 Principle

 Non-dispersive infrared

(NDIR) absorption technolgy

 Application

 CO, CO2 and CH4 in N2, He, O2, Air, and Ar.

Range

0 - 1/2/5/10 ppm

Min. detection sensitivity

0.01 ppm (1 sigma)

Repeatability

}2% F.S.

Linearity

}2% F.S.

Zero drift

}0.02 ppm/day
}0.03 ppm/7days

Span drift

}2% F.S./day
}3% F.S./7days

Response time (T90)

Within 180 sec.

Sample gas flow rate

Approx. 3.5L/min

Reference gas flow rate

Approx. 3.5L/min

Indication

Measured value, range, alarm

Reference gas

N2, He, O2, Air, and Ar.

Sample / Reference gas pressure

50`100kpa

Alarm

Flow, chopper, power down

Output

0 - 1 V, 10V, 4 - 20 mA

Power

AC 100 V, 110 V, 115 V, 220 V, 230 V, 240 V  (to be specified)

Remarks:

1) The two-component version measures any two of the above three components specified by the customer.

2) Reference gas is to be supplied by the customer.

Ametek • Badger Meter • Baseline Mocon • Berkeley Nucleonics • BH Thermal Corp • Brandt - Thermo • Bud Industries • Ceasefire • Chandler Engineering - Ametek • Daniel Industries • Dent Instruments • Draeger Gas Detection Systems • Dycor - Ametek • FasTest • Fox Thermal Instruments • Gasmet • H2Scan • Hawk Measurement Systems • Horiba • ION Science • JMS Southeast • Kahn Instruments • Kanomax • Lakewood Instruments • Land - Ametek • Magnatrol Valve • Martel Electronics/Beta Calibrators • Measurement Technologies • Odor Eyes • Percival Scientific • Perma Pure LLC • Process Instruments - Ametek • Process Sensors • Racine/Preso Flow Metering • R. Stahl • RKI Instruments • Rosemount Tank Gauging • Sarasota - Thermo • Spectite • Texas Nuclear Kay/Ray Sensall - Thermo • Testo • Thermo • Thermox - Ametek • Trace Analytical - Ametek • United Electric Controls • Welker • Western Research - Ametek • Westronics - Thermo • Wilkerson Instrument Co 

ETA Process Instrumentation, 119 Foster Street, Bldg. 6, Peabody, MA 01960 • (978) 532-1330 or sales(a)etapii.com
Privacy Policy • Trade Mark Statement • Contact Us • Webmail Login