ETA Process Instrumentation - since 1971

ETA Process Instrumentation -- Since 1971

ETA Associates merged with Process Instrumentation Inc. as of 9/1/2011. Visit our sister companies: Safety Inc and iFacility Service.

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Horiba Environmental
and Process Instruments 		 

TG-520 / CU-2 Ambient Ammonia Gas Analyzer

 Horiba TG-520

Overview

TG-520 and CU-2 Ambient ammonia analyzer in Semiconductor clean room is monitoring life time of chemical filter to remove ammonia gas, major basic proportional gas of chemical contamination component in clean room, in real time. It enables to get reliable measurement value to measure differential concentration between ambient nitrogen oxide and increased nitrogen oxide after oxidation catalyst reaction as ammonia concentration directly with cross-flow modulation type chemiluminescence method with 10ppb at min. detectable sensitivity.
 

Features

  • System configuration of NOX analyzer unit with CU-2 converter unit to be oxidized NH3 into NO.
  • No utility is required such as carrier gas and column.

Manufactured by HORIBA

 

Specifications

Measurement component

Ammonia(NH3jin clean room ambient air

Measurement principle

Oxidation catalyst + chemiluminescence method

Measurement range

0`0.1/0.2/0.5/1.0ppm

Lower detectable limit

1ppb

Repeatability

}3.0“ of F.S.

Linearity

}2.0“ of F.S.

Zero drift

}2.0% of F.S./day

Span drift

}2.0% of F.S./day

Response time(T90)

300 sec. or less (from CU-2 converter unit)

Sample gas flow rate

approx. 3.0L/min

Operation gas

None

Indication

Measuring value, alarm

Alarm

CU-2: Temperature error in catalyzer unit
TG-520: Calibration error, Battery error, Flow rate error, Pressure error,@temperature error in converter, etc.

Input / Output

0`1V / 0`10V / 4`20mA(2 systems: either (1) momentary value and integrated of (2) moving average value)
Contact input/output
RS-232C(option)

Temperature/Humidity

0-40Ž 85% or less

Power

AC100V 50/60Hz

Power consumption

CU-2: approx. 200VA
TG-520: approx. 200VA

Dimension

CU-2: 430(W) X 450(D) X 310(H) mm
TG-520: 430(W)~550(D)~221(H) mm

Mass

CU-2: approx. 20kg
TG-520: approx. 26kg

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ETA Process Instrumentation, 119 Foster Street, Bldg. 6, Peabody, MA 01960 • (978) 532-1330 or sales(a)etapii.com
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