ETA Process Instrumentation - since 1971

ETA Process Instrumentation -- Since 1971

ETA Associates merged with Process Instrumentation Inc. as of 9/1/2011. Visit our sister companies: Safety Inc and iFacility Service.

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Ametek Thermox Ametek Trace Analytical Gas Chromatographs

 

Highly sensitive gas chromatographs for the continuous measurement of trace impurities in ultra high purity atmospheric gases, processes, and ambient air, air and water environmental monitoring applications, and laboratory applications. The Trace Analytical product line includes ancillary devices such as gas blending systems and high purity stream switching equipment.

Ametek Trace Analytical ta3000 can be linked to a Sigma 4000 Multipoint Stream Selector Sigma 4000 Multipoint Stream Selector                                  Downoad printable brochure

The Need

Proper monitoring of the purity of the process gases which feed semiconductor manufacturing equipment and processes requires monitoring at multiple sample points. However, placing individual gas purity analyzers at all these sample points can be very expensive.

The Solution

Sigma 4000 multipoint stream selectors from Trace Analytical can dramatically reduce the cost of ultra high purity (UHP) gas monitoring. By multiplexing several sampling points to a single ta3000 or ta5000 Process Gas Analyzer, a gas manager can ensure that UHP quality product is supplied to process tools without dedicating an instrument to each gas stream. Controlled by the gas chromatograph, a Sigma 4000 stream selector can poll several gas streams in sequence, or can be programmed to switch between the inlets and outlets of large scale purifiers to verify their performance.

Sigma 4000 multipoint stream selectors improve the confidence in your gas supply by making it practical to monitor impurities such as H2, CO, CO2, CH4 and THC's in all of your most critical gas streams.

Features

  • Four sample inlets, two cal. gas inlets
  • ¼-inch VCR gas ports
  • UHP shut-off valves
  • Rapid sequencing between gas steams
  • Orbitally-welded and vacuum brazed joints
 
Specifications
Gas Inlets
Sigma4000: 4 samples, ¼-inch face seal fitting, female, S.S.
Zero gas, Span gas: ¼-inch face seal fitting, female, S.S.
Purge gas: ¼-inch face seal fitting, female, S.S.
Sample Requirements  
Supply Pressure: 15 to 40 psig (1.03 to 2.76 bar)
Continuous Flow: 0.35 L/min. N2 @ 15 psig (1.03 bar)
Gas Outlets  
Selected stream outlet: 1/16-inch compression fitting
Sample vent: ¼-inch face seal fitting, female, S.S.
Purge vent: ¼-inch face seal fitting, female, S.S.
Front Panel: Stream ID number
Pressure, selected stream
Electrical
Mains:

115 VAC / 50 - 60 Hz,

230 VAC / 50 - 60 Hz, or

100 VAC / 50 - 60 Hz

Operating current: 3 amps, max.
Materials of Construction
Manifold: Orbitally welded UHP branch valves; <1x10-9 cc-atm/sec He leak rate
Sample Inlets: Orbitally welded EP tubing
Control/Communication: Serial RS-232 communication link from ta3000/ta5000/ta7000
Sequencer program to stream selector. Stream ID number and
data reported to optional host computer by ta3000/ta5000/
ta7000.
Dimensions Sigma4000: 5.2” H x 16.8” W x 18” D (133 cm x 427 cm x 457 cm)
Weight Sigma4000
Net: 38.0 lb (17.3 kg)
Shipping: 41.5 lb (18.9 kg)
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ETA Process Instrumentation, 119 Foster Street, Bldg. 6, Peabody, MA 01960 • (978) 532-1330 or sales(a)etapii.com
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